Method of manufacturing the pole pieces and the gap of magnetic heads in thin layers
US5062196A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 27, 1990 |
| Grant date | Nov 5, 1991 |
| Priority date | — |
| Expiry date | Aug 27, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49046
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of manufacturing the pole pieces and the gap of magnetic heads in thin layers for computer, audio and video applications, starting from a silicon substrate, includes formation of an insulator layer on a silicon substrate followed by deposition of a metal layer on the insulator layer and of a masking resin layer on the metal layer. The substrate covered with the insulator layer and the metal layer is etched to form wells bordering a bar of a determined width and the left-over portion of the metal layer etched is removed. The etched substrate is thermally oxidized to develop a silicon oxide layer enabling the bar to be adjusted to obtain the desired gap. A conductive layer is deposited at the bottom of the wells followed by the electrolytic deposition of a magnetic material in the wells and the removal of the left-over portion of the insulator layer initially deposited on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.