Surface cleaning using a cryogenic aerosol

US5062898A · kind A · utility

Assignees

• AIR PRODUCTS AND CHEMICALS, INC. · US
• International Business Machines Corporation · US

Inventors

• Wayne Thomas McDermott · Fogelsville, US
• Richard Carl Ockovic · Northampton, US
• Jin J. Wu · Hopewell Junction, US
• Douglas W. Cooper · Ramsey, US
• Alexander Schwarz · Soest, DE
• Henry L. Wolfe · Pleasant Valley, US

Key dates

• Filing date: Jun 5, 1990
• Grant date: Nov 5, 1991
• Expiry date: Jun 5, 2010

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67028
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A method is disclosed for cleaning microelectronics surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.