Converged ion beam apparatus
US5063294A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 1990 |
| Grant date | Nov 5, 1991 |
| Priority date | — |
| Expiry date | May 17, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.