Field emitter structure providing passageways for venting of outgassed materials from active electronic area
US5063323A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1990 |
| Grant date | Nov 5, 1991 |
| Priority date | — |
| Expiry date | Jul 16, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2209/3893
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Outgassed materials liberated in spaces between pointed field emitter tips and an electrode structure during electrical operation of a field emitter device are vented through passageways to a pump of gettering material provided in a separate space. The passageways may include channels formed through an insulating layer between a base for the field emitters, and the electrode structure, with the channels interconnecting adjacent spaces in a row direction. Where the electrode structure includes a gate electrode layer and an anode layer, similar channels may be formed through an insulator layer provided therebetween. The field emitters may be formed in an arrangement of rows and columns, with the spacing between the columns smaller than the spacing between the rows.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.