Plasma reactor
US5063330A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 7, 1991 |
| Grant date | Nov 5, 1991 |
| Priority date | — |
| Expiry date | Jan 7, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32192
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a plasma reactor including a housing which receives a selected gas flow, a microwave generator, and waveguide means to supply the microwaves to the housing according to a non-resonant coupling wherein the housing does not dissipate in the form of electromagnetic radition the ultrahigh frequence energy which is imparted to the housing in the presence of gas. According to a general definition of the invention, the housing being of a large size, the terminal portion of the waveguide means is progressively reduced in one direction and widened in the other direction till it reaches a flat rectangular cross-section surrounding completely the housing, and it forms a non-resonant coupling with the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.