Method of forming a pseudo-diamond film on a base body
US5064682A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 1990 |
| Grant date | Nov 12, 1991 |
| Priority date | — |
| Expiry date | Oct 23, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/221
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of forming a pseudo-diamond film on a base body, the method comprising a first step of irradiating carbon ions onto a surface of a base body from an assisting ion gun to form a mixture layer comprising base body material atoms and carbon atoms; a second step of simultaneously vapor-depositing the carbon atoms from a vapor deposition source and irradiating hydrogen ions from the assisting ion gun onto the mixture layer to form pseudo-diamond cores on the mixtures layer; and a third step of vapor-depositing carbon atoms from the vapor deposition source and irradiating hydrogen ions from the assisting ion gun onto the pseudo-diamond cores to form a pseudo-diamond film on the pseudo-diamond cores.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.