Patent · US Expired

Pressure sensor

US5070735A · kind A · utility

17Cited by

4References

4Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Hansjoerg Reichert · Munich, DE
Karl Platzoeder · Unterschleißheim, DE
Guenter Ehrler · Holzkirchen, DE

Key dates

Filing date	May 30, 1990
Grant date	Dec 10, 1991
Priority date	—
Expiry date	May 30, 2010

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/0618
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A silicon membrane pressure sensor which has a carrier chip and a membrane chip 3 for which overload protection is desired to protect against the pressure on the front side of the membrane. An overload member 7 is mounted between the carrier chip 2 and the membrane chip 3 such that the overload member is connected to the membrane chip at a middle island portion 5 of the membrane chip 3 and with a first distance D1 from the carrier chip 2 in the non-loaded condition such that when pressure occurs the overload member will remove the load on the membrane chip.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.