Method of making a semiconductor memory device
US5071784A · kind A · utility
8Cited by
4References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 1990 |
| Grant date | Dec 10, 1991 |
| Priority date | — |
| Expiry date | Nov 21, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/30
Abstract
A semiconductor memory device includes a memory cell array comprised of a plurality of memory cells each having a single transfer transistor and a single capacitor and a peripheral circuit including a plurality of drive transistors and adapted to drive the memory cell. The source and drain regions of the transfer transistor have an impurity concentration lower in level than that of the source and drain regions of the drive transistor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.