Oxide powder, sintered body, process for preparation thereof and targe composed thereof
US5071800A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1990 |
| Grant date | Dec 10, 1991 |
| Priority date | — |
| Expiry date | Feb 27, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B35/01
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An indium oxide powder or indium oxide/tin oxide powder having an average primary particle diameter of 1 to 0.01 .mu.m, a BET surface area of 15 to 50 m.sup.2 /g, and a specific surface area of 2 to 5 m.sup.2 /g as determined from the particle diameter distribution. The mixed powder is prepared by coprecipitating an indium- and tin-containing salt from a solution containing indium and tin, calcining the salt, and pulverizing the calcined product using a specific vibrating pulverizer. A sintered body, prepared by sintering the indium oxide/tin oxide powder, has a density of at least 5.3 g/cm.sup.3, a specific resistance of 2.times.10.sup.-3 to 2.times.10.sup.-4 .OMEGA.-cm, and an average grain diameter of 5 to 15 .mu.m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.