Microprobe preparation thereof and electronic device by use of said microprobe
US5072116A · kind A · utility
83Cited by
2References
68Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1990 |
| Grant date | Dec 10, 1991 |
| Priority date | — |
| Expiry date | Nov 9, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.