Patent · US Expired

Ink recording apparatus provided with shutter

US5072241A · kind A · utility

36Cited by
2References
3Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 1990
Grant dateDec 10, 1991
Priority date
Expiry dateSep 10, 2010

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB41J2/1628
  • WIPO fieldTextile and paper machines
  • WIPO sectorMechanical engineering

Abstract

An ink recording apparatus used with printers or the like and manufactured by applying semiconductor device manufacturing techniques. One wall of an ink chamber is formed of a single-crystal substrate and an ink jet port is formed by etching on the single-crystal substrate. A shutter and electrodes composed of polycrystalline-silicon film are formed on the single-crystal substrate by film forming in the LPCVD method and patterning through plasma etching. A front wall is formed by coating the shutter and electrodes further with a polycrystalline-silicon film. The shutter is movable between the wall surface of the ink chamber and the front wall, being driven through electrostatic attracting force produced between voltage-applied electrodes and the shutter. The electrodes are formed at positions corresponding to those where the shutter blocks the ink jet port and releases the same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.