Preparation of silicon nitride powder
US5073358A · kind A · utility
5Cited by
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7Claims
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Key dates
| Filing date | Jul 24, 1990 |
| Grant date | Dec 17, 1991 |
| Priority date | — |
| Expiry date | Jul 24, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B21/0682
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Silicon nitride powder is prepared by continuously supplying metallic silicon powder to a first fluidized bed which is composed of silicon nitride powder and a non-oxidizing reaction gas containing nitrogen or ammonia gas and maintained at 1,000.degree. to 1,400.degree. C. where primary nitriding reaction takes place, and continuously withdrawing the nitride product from the first fluidized bed and supplying it to a second fluidized bed of similar composition where secondary nitriding reaction takes place for nitriding the unreacted metallic silicon powder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.