Method and apparatus for measuring the electrical properties of dielectric film in the gigahertz range
US5073755A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 19, 1990 |
| Grant date | Dec 17, 1991 |
| Priority date | — |
| Expiry date | Mar 19, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/2635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dielectric test device formed on a substrate which includes a conductive ground plane layer formed over the substrate, a dielectric layer over the ground plane layer and a short and long conductive strip overlying the dielectric layer. Each of the long and short strips extends between common input and output conductive pads and are substantially identical in all respects except for length. Measurement of the interference pattern at the output node resulting from an input signal of a single frequency applied to the input node as frequency is varied over the gigahertz range allows the calculation of effective dielectric constant, propagation velocity as a function of frequency and attenuation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.