Sample moving apparatus, sample moving system and semiconductor manufacturing apparatus
US5073912A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1989 |
| Grant date | Dec 17, 1991 |
| Priority date | — |
| Expiry date | Nov 14, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A sample moving apparatus for positioning wafers with high accuracy, which apparatus comprises a fine adjustment actuator having a drive stroke to finely move the wafer, a fine adjustment stage driven by the fine adjustment actuator, a coarse adjustment actuator having a drive stroke to relatively coarsely move the wafer, a coarse adjustment stage driven by the coarse adjustment actuator, and a holder arrangement for attractively holding the wafer onto the wafer bearing surfaces of the respective stages. Upon selective energization of the holder arrangement of the respective stages, the wafer is moved while being attracted to the coarse adjustment stage or while being attracted to the coarse adjustment stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.