Device to cover a flat surface with a layer of uniform thickness
US5074246A · kind A · utility
10Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1990 |
| Grant date | Dec 24, 1991 |
| Priority date | — |
| Expiry date | Mar 7, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus and method for depositing on the flat surface (4) of a substrate (1) a layer of uniform thickness of particles emitted by a source (5). The substrate (1) is held at the extremity of a radial arm (2) which arm in turn is carried on a rotating axis (3). The substrate also rotates on the arm (2) and is carried on the arm so that the flat surface (4) is orientated such that a line drawn normal to the flat surface forms an angle (.theta.) with the axis (3). The apparatus is particularly suited for the production of optical parts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.