Semiconductor wafer carrier design
US5074736A · kind A · utility
6Cited by
12References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1990 |
| Grant date | Dec 24, 1991 |
| Priority date | — |
| Expiry date | Dec 19, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier-susceptor for use in a continuous chemical vapor deposition reactor system serves as a carrier, cover and heat susceptor for a semiconductor wafer being processes through the reactor system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.