Apparatus and method for precisely exposing radiation sensitive materials
US5075716A · kind A · utility
17Cited by
16References
56Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 1990 |
| Grant date | Dec 24, 1991 |
| Priority date | — |
| Expiry date | Nov 29, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03D13/007
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Radiant energy is directed from a source (14,16) to an illumination plane (28) where the light receiving ends of groups (36) of optic fibers are arranged in coplanar striations (100), after which the radiant energy passes through the groups of optic fibers into individual exposure columns (40) and on to an exposure plane (42) where a radiation sensitive sample is exposed in individual areas to different, readily adjustable levels of illuminance from each of the groups of optic fibers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.