Dynamic imaging microellipsometry
US5076696A · kind A · utility
35Cited by
1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 1989 |
| Grant date | Dec 31, 1991 |
| Priority date | — |
| Expiry date | Mar 16, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Dynamic imaging microellipsometry (DIM) is a rapid full-field imaging technique for high resolution studies of thin-films. The DIM concept is based on radiometric polarizer, compensator, specimen, analyzer (PCSA) ellipsometry combined with video and image processing techniques. The theoretical basis for this approach is developed using the Jones vector and matrix formalism. Basic systems design is presented with error model predictions of ellipsometric accuracies better than 0.1.degree. for full-field .psi. and .DELTA. images captured in a few seconds with spatial resolution under 10 microns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.