Patent · US Expired

Glow discharge chamber and gas flow system for glow discharge emission spectrometer

US5078494A · kind A · utility

2Cited by
3References
19Claims
0Family size

Inventor

Key dates

Filing dateApr 15, 1991
Grant dateJan 7, 1992
Priority date
Expiry dateApr 15, 2011

Classification

  • Technology area (CPC A)Human Necessities
  • CPC primaryA61B5/083
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A glow discharge chamber for a glow discharge emission spectrometer has a housing with a cavity. The cavity has a gas inlet and a gas outlet. The gas outlet is adapted to be connected to a vacuum pump to produce flow of gas through the cavity. An anode is located within the cavity adjacent to the gas outlet. A cathode is located in the cavity and gas within the cavity emits negative glow radiation adjacent to the cathode when a voltage differential between the anode and cathode exists. A radiation transmissive, gas retaining window in the housing through which negative glow radiation passes from the cavity to one or more radiation sensors for spectral analysis. The flow of gas through the cavity channels sputtered cathode oxides away from the window due to the cathode and anode arrangement in the cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.