Sensor having a cantilever
US5079958A · kind A · utility
25Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 1990 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Mar 12, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor comprises a tiny cantilever of a thin film having a detection region at its free end portion, a detector for detecting a displacement of the cantilever caused by material acting on the detecting region, and calculation unit for calculating an amount of the material acting on the detection region, based on the displacement of the cantilever which has been detected by the detector, thereby to measure the intensity of a particle-stream applied to the detection region or the thickness of a film formed on the detection region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.