Mass flow controller
US5080131A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 1990 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Sep 10, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87338
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead. Expansion plugs are fitted in the through holes in which no bypass elements are fitted not to cause gas to flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.