Scanning microscope and scanning mechanism for the same
US5081350A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 24, 1990 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Sep 24, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0036
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A confocal scanning microscope comprises a sample supporting member on which a sample is supported, and a light source which produces a light beam. A light projecting device forms an image of the light beam as a small light spot on the sample. A light receiving device condenses the light beam, which has been radiated out of the sample, and forms an image of the condensed light beam as a point image. A photodetector detects the point image. A movable member supports the light projecting device and the light receiving device. A main scanning device reciprocally moves the movable member such that the light spot scans the sample in main scanning directions. A sub-scanning device moves the sample supporting member with respect to the movable member in sub-scanning directions, which are normal to the main scanning directions, and at a speed lower than the speed at which the light spot scans the sample in the main scanning directions, whereby the sample is scanned with the light spot in the sub-scanning directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.