Combined scanning electron and scanning tunnelling microscope apparatus and method
US5081353A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 1991 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Feb 11, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/861
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sample is mounted on a support table adjacent a probe of a scanning tunnelling microscope, the support table permitting the sample to move relative to the probe. The probe is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope is located adjacent the sample and probe, and its electron beam scans both the sample and the probe and generates an image on a display from electrons from the sample detected by a detector. In order that that operator can position the probe on a target of a sample, for scanning by the probe, a marker is generated on the display by a graphics display unit, which marker indicates the probe-to-sample separation and preferably indicates the probe-to-sample approach point and the direction of movement of the probe towards the sample. The graphics display unit may alternatively, or in addition, generate a marker representing the scan area of the probe when it is moved to a scanning separation from the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.