Resonant radio frequency wave coupler apparatus using higher modes
US5081398A · kind A · utility
58Cited by
8References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1989 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Oct 20, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/30
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved apparatus for generating a uniform electron cyclotron resonance (ECR) region in a plasma region (16) of a chamber (15) is described. The apparatus uses higher modes of electrical field cusps (16b) which are essentially perpendicular to the magnetic field cusps (16a) in a controlled manner to produce the ECR. The modes are optimal in the ECR region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.