Patent · US Expired

Heterojunction field effect transistor with monolayers in channel region

US5081511A · kind A · utility

26Cited by
3References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 6, 1990
Grant dateJan 14, 1992
Priority date
Expiry dateSep 6, 2010

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/605
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A heterojunction field effect transistor (HFET) having a source, drain, and channel, wherein the channel comprises a quantum well and at least one mono-atomic well or barrier layer is provided. The mono-atomic well or barrier layer has a different bandgap than the channel region and serves to modify electron wave function and conduction band energy in the channel region. Preferably, an indium arsenide well monolayer is formed in an InGaAs channel region and functions to move a first quantized energy level E.sub.0 closer to the bottom of the channel region quantum well thereby increasing electron concentration by increasing effective band offset potential. Another embodiment uses an aluminum arsenide monolayer as a barrier monolayer in the InGaAs channel. By varying location of the monolayers, confinement of electrons in the channel can be improved.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.