Apparatus for controlling output from an excimer laser device
US5081635A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1990 |
| Grant date | Jan 14, 1992 |
| Priority date | — |
| Expiry date | Feb 26, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for controlling an output from an excimer laser device wherein at least two etalons each having a large diameter are arranged between a rear mirror and a laser chamber for the excimer laser device is disclosed. With the apparatus, the operative range of laser light outputted from the excimer laser device can be narrowed by executing superposition control for a wavelength of laser light which transmits through each etalon, while maintaining the number of spatial lateral modes. The apparatus is preferably employable as a light source particularly for a unit for projecting and exposing figures in a reduced size. Superposition control with the use of a superposition control unit, excitation intensity control for laser gas with the use of an excitation intensity control unit and partial gas replacement control for laser gas with the use of a gas control unit are executed in a predetermined timing relationship, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.