Electronic microvalve apparatus and fabrication
US5082242A · kind A · utility
170Cited by
6References
10Claims
0Family size
Inventors
Key dates
| Filing date | Dec 27, 1989 |
| Grant date | Jan 21, 1992 |
| Priority date | — |
| Expiry date | Dec 27, 2009 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/008
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.