Thin-film spectroscopic sensor
US5082629A · kind A · utility
169Cited by
36References
27Claims
0Family size
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Key dates
| Filing date | Dec 29, 1989 |
| Grant date | Jan 21, 1992 |
| Priority date | — |
| Expiry date | Dec 29, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/80
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device. There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide, a substrate, an entrance grating and an exit grating, an electromagnetic radiation source, and an electromagnetic radiation sensing device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.