Patent · US Expired

Apparatus for the ablation of material from a target and coating method and apparatus

US5084300A · kind A · utility

22Cited by

12References

2Claims

0Family size

Assignee

Forschungszentrum Jülich GmbH · DE

Inventors

Willi Zander · Aldenhoven, DE
Bernd Stritzker · Kissing, DE
Joachim Frohlingsdorf · Leverkusen, DE

Key dates

Filing date	May 2, 1990
Grant date	Jan 28, 1992
Priority date	—
Expiry date	May 2, 2010

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S505/786
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A rotating cylindrical target has material ablated therefrom by a laser beam trained to contact the surface along a line parallel to the rotation axis, thereby avoiding problems of crater formation which arise with disc-shaped targets.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.