Method and apparatus for processing a thermal flowrate sensor signal
US5086745A · kind A · utility
15Cited by
9References
6Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 10, 1990 |
| Grant date | Feb 11, 1992 |
| Priority date | — |
| Expiry date | Jul 10, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6965
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of processing a signal of a thermal flow-rate sensor, provides a temperature monitor for monitoring a temperature at a representative point on a substrate support member; obtains the temperature at the representative point corresponding to the flow rate by use of the temperature monitor; and corrects an output of the sensor in accordance with a value corresponding to the temperature as well as a value corresponding to the temperature at the representative point when the flow rate is in a steady state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.