Examination apparatus
US5090415A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 1991 |
| Grant date | Feb 25, 1992 |
| Priority date | — |
| Expiry date | Jan 11, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An examination apparatus for examining with transmission photometry an object of interest. The apparatus comprises: light launching means for successively launching an incidence light beam to the object at an incidence site; and light pickup means for picking up, in synchronism with launching of the incidence light beam, light beams scattered in the object from a plurality of output sites as light intensity data, and performing mathematical processing on the light intensity data for every launching of said incidence light beam to obtain absorption data representing a light absorption quantity at the incidence site.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.