Patent · US Expired

Examination apparatus

US5090415A · kind A · utility

123Cited by
5References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 11, 1991
Grant dateFeb 25, 1992
Priority date
Expiry dateJan 11, 2011

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2201/08
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An examination apparatus for examining with transmission photometry an object of interest. The apparatus comprises: light launching means for successively launching an incidence light beam to the object at an incidence site; and light pickup means for picking up, in synchronism with launching of the incidence light beam, light beams scattered in the object from a plurality of output sites as light intensity data, and performing mathematical processing on the light intensity data for every launching of said incidence light beam to obtain absorption data representing a light absorption quantity at the incidence site.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.