Substrate heater and heating element
US5093557A · kind A · utility
28Cited by
11References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1989 |
| Grant date | Mar 3, 1992 |
| Priority date | — |
| Expiry date | May 16, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/265
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Heat is provided to substrates at a step of a process by providing identical movable heating devices, one for each substrate, placing each substrate onto one of the heating devices, sequentially moving each device into a position where the step of the process can be performed on the substrate, and causing each of the devices to provide heat to the substrate at each step of the process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.