Reflection electron diffractometer and method for observing microscopic surface structure
US5093573A · kind A · utility
13Cited by
7References
2Claims
0Family size
Inventors
Key dates
| Filing date | Jun 4, 1990 |
| Grant date | Mar 3, 1992 |
| Priority date | — |
| Expiry date | Jun 4, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/255
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved RHEED apparatus and a method for observing step-like surface irregularities of a sample by the use of the improved RHEED apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.