High resolution electron energy loss spectrometer
US5097126A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 25, 1990 |
| Grant date | Mar 17, 1992 |
| Priority date | — |
| Expiry date | Sep 25, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2823
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and an apparatus comprising an electron gun, two energy analyzers, an energy-selecting slit with intensity sensors, a feedback circuit, a sample, and an electron detector. The beam produced by the electron gun is dispersed according to the energies of the electrons by the first energy analyzer. The dispersed beam impinges on a slit which monochromates the beam by selecting a narrow pass-band of energies. The two halves of the slit are equipped with electron intensity sensors whose output is used by a feedback circuit to stabilize the position of the dispersed beam on the slit so as to counteract instabilities in the power supplies of the electron gun and of the analyzer. The monochromated electron beam then passes through a sample, and the transmitted beam is dispersed according to the energies of the electrons by the second energy analyzer. The power supplies of the two analyzers are linked so that the energy selected by the second analyzer tracks the energy selected by the first analyzer. The second analyzer therefore automatically tracks instabilities in the gun high voltage, and the whole apparatus is able to achieve much higher energy resolution than if all the power …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.