Scanning electron microscope
US5097134A · kind A · utility
16Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 1990 |
| Grant date | Mar 17, 1992 |
| Priority date | — |
| Expiry date | Nov 21, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope permitting observation of raw biological specimens containing moisture. A vessel accommodating water supplied to the specimen is formed. A passage is formed in the specimen chamber of the microscope to convey the liquid from the vessel to the specimen. A pipe for introducing a gas such as air is connected with the passage. The introduced gas leaks around the specimen after flowing through the passage to prevent the liquid from freezing in the vessel and in the passage when the specimen chamber is evacuated to a vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.