Intelligent waxer carrier
US5097421A · kind A · utility
53Cited by
18References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 18, 1987 |
| Grant date | Mar 17, 1992 |
| Priority date | — |
| Expiry date | May 18, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70991
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.