High speed wafer handler
US5098245A · kind A · utility
5Cited by
14References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 1990 |
| Grant date | Mar 24, 1992 |
| Priority date | — |
| Expiry date | Nov 5, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67751
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention describes a loading system for high speed loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications such as inspection or processing using, for example, a SEM. This system provides low contamination from atmospheric conditions both on loading and unloading the wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.