Production system using wafer-like carrier jig
US5100276A · kind A · utility
23Cited by
22References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 11, 1988 |
| Grant date | Mar 31, 1992 |
| Priority date | — |
| Expiry date | Aug 11, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67727
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.