Microminiature tapered all-metal structures
US5100355A · kind A · utility
39Cited by
8References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1991 |
| Grant date | Mar 31, 1992 |
| Priority date | — |
| Expiry date | Jun 28, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a structure comprising an ultra-sharp silicon tip coated with a layer of material, the silicon is removed from the structure. The remaining material is utilized as a mold. Metal deposited in the mold replicates the original silicone tip. In this way, ultra-sharp all-metal tips suitable, for example, as field-emitter sources are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.