Rotating magnetron incorporating a removable cathode
US5100527A · kind A · utility
28Cited by
7References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 1990 |
| Grant date | Mar 31, 1992 |
| Priority date | — |
| Expiry date | Oct 18, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A rotatable magnetron having a cathode and a bearing assembly wherein the cathode may be removed from a coating chamber while the bearing assembly remains in place.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.