Optical pressure transducer
US5101664A · kind A · utility
21Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1990 |
| Grant date | Apr 7, 1992 |
| Priority date | — |
| Expiry date | Oct 15, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined silicon pressure transducer employs a vibrating bridge that is formed from the same silicon slab as the pressure responsive diaphragm. The resonant frequency of the bridge is a temperature insensitive representation of the pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.