Interferometer alignment control apparatus
US5102214A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 26, 1989 |
| Grant date | Apr 7, 1992 |
| Priority date | — |
| Expiry date | Dec 26, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An alignment and path length control apparatus having a mirror housing having a base and a closed wall. The base has a mirrored external surface. The closed wall has a central axis. The closed wall is joined to the base at a base end of the closed wall by a flexible web. The closed wall extends above the base and terminates at a rim defining an aperture. The base has a central region coupled to the cylindrical wall. A post extends from the central region of the base within the cylindrical wall to a top end. A mirror axis extends from the mirrored external surface through the post. The central axis is substantially parallel to the mirror axis. An alignment transducer responds to a first alignment control signal by applying at least a first force between the post and the wall to deflect the mirror axis with respect to the central axis. A linear transducer responds to a linear displacement control signal by applying an axial force to the post to displace the central region longitudinally along the central axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.