Wafer inspection system
US5105147A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 25, 1989 |
| Grant date | Apr 14, 1992 |
| Priority date | — |
| Expiry date | May 25, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for the semiautomatic inspection of printed circuits on silicon wafers and other similar micro-electronic products which comprises in combination a floating table supporting a robot arm which has the function of grabbing a single wafer from a cassette in which it is housed, inverting same, or assuming a position with its axis defining the Y-axis of the scanning system, and of moving in this direction; and of placing after inspection such wafer in another cassette according to the grade it received; an optical inspection device, such as optical microscope combined with a TV camera or the like attached to said same table, said microscope being adapted to move in the direction of the X-coordinate of the inspection system, there being provided means for aligning the direction of the printed circuit with the X-Y coordinates of the scanning system. A sophisticated optoscanner system is used for the alignment of the wafer and for establishing its exact position. The wafer is held by a vacuum gripper from the moment of its removal from the first cassette and up to its insertion into another one.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.