Vacuum pump for producing a clean molecular vacuum
US5106273A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 5, 1991 |
| Grant date | Apr 21, 1992 |
| Priority date | — |
| Expiry date | Mar 5, 2011 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vacuum pump for producing a clean molecular vacuum, the vacuum pump comprising a stator (1A, 1B) and a rotor (2), the rotor being driven by a drive motor (6, 7, 8) integrated in the pump, the rotor being supported by magnetic bearings, and being bell-shaped fitting over an internal projection (3) protruding from the stator, the stator components (7, 8) of the drive motor and of the bearings (11B, 12B, 13B, 15, 16) being situated on the periphery of the internal projection (3), the rotor components (11A, 12A, 13A, 14) of the drive motor and of the bearings being situated on the internal periphery of the bell-shaped rotor (2), the vacuum pump being characterized in that a first gastight coating (29) made of non-magnetic material covers the projection (3) overlying the stator components of the motor and of the bearings, and in that similarly in the rotor a second gastight coating (30) made of non-magnetic material covers the rotor components of the drive motor and of the bearings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.