Spherical electrode type charged particle analyzer
US5107111A · kind A · utility
5Cited by
3References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 1990 |
| Grant date | Apr 21, 1992 |
| Priority date | — |
| Expiry date | Jul 6, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24585
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle analyzer comprises a spherical grid, a spherical electrode concentric with each other, an emission portion for emitting charged particles, a screen plate having an exit opening, a plurality of second spherical grids forming a high pass filter for the charged particles, a detector for detecting the charged particles, and an obstacle ring being in parallel with an equatorial plane normal to a line connecting the emission portion and the center of the exit opening and being within the spherical electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.