Pressure sensor

US5107710A · kind A · utility

Assignee

• Degussa AG · DE

Inventors

• Ralf Huck · Großkrotzenburg, DE
• Wolfgang Muller · Königsfeld, DE

Key dates

• Filing date: Oct 31, 1990
• Grant date: Apr 28, 1992
• Expiry date: Oct 31, 2010

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/065
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor (38) is proposed with strain gauges (18, 20, 22, 24) such as thick-film resistance strain gauges arranged on a diaphragm, these gauges being preferably connected to form a Wheatstone bridge, where branches of the bridge circuit have compensating resistors (26, 28, 30, 32). The compensating resistors are arranged outside the active area (17) of the diaphragm.