Method of calibrating scanners and arrangement for producing defined scattered light amplitudes
US5108176A · kind A · utility
27Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 1990 |
| Grant date | Apr 28, 1992 |
| Priority date | — |
| Expiry date | May 21, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4785
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Calibration of a light scanner, particularly for measuring particles and surface finishes in the inspection of substrates uses a strongly scattering reference medium. A focused laser beam is directed onto the reference medium which is disposed outside the focal plane of the beam. Scattered light from the medium is thus defocused with respect to a photodetector that collects the scattered light. An amplifier connected to the photodetector measures the intensity of the scattered light. By the use of filters in the path of the light calibration of the optico-electronic system of the scanner is achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.