Method for producing thin film of oxide superconductor
US5108984A · kind A · utility
5Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1990 |
| Grant date | Apr 28, 1992 |
| Priority date | — |
| Expiry date | Dec 19, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/732
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A thin film of an oxide superconductor having a homogeneous composition and less oxygen defects is produced by independently vaporizing at least one material selected from the group consisting of the elements of Ia, IIa and IIIa groups of the periodic table and their compounds and at least one material selected from the group consisting of the elements of Ib, IIb and IIIb groups of the periodic table and their compounds in the presence of molecular oxygen and depositing the vaporized materials together with oxygen on a substrate to form a thin film of the oxide superconductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.