Transport system for inline vacuum processing
US5110249A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 14, 1989 |
| Grant date | May 5, 1992 |
| Priority date | — |
| Expiry date | Aug 14, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An inline processing system for processing a batch of pallets, including a first magazine for supporting a predetermined number of unprocessed pallets. A load chamber for receiving and supporting the first magazine and for indexing the magazine to present individual ones of the unprocessed pallets to a transport position. One or more process chambers located inline with the load chamber and with each process chamber including a pair of valves at opposite ends of each process chamber to control the passage of individual ones of the pallets between each process chamber and the adjacent chamber. A second magazine for supporting the predetermined number of pallets after processing. An unload chamber for receiving and supporting the second magazine and for indexing the magazine to receive individual ones of the processed pallets from a transport position. A plurality of carriers equal in number to the number of chambers less one for location within the chambers for receiving individual ones of the pallets from the first magazine and for supporting the individual ones of the pallets for transport between the chambers to the second magazine. A drive and support structure located within ea…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.