Amorphous oxide film and article having such film thereon
US5110637A · kind A · utility
85Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 1989 |
| Grant date | May 5, 1992 |
| Priority date | — |
| Expiry date | Mar 3, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02T10/90
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An amorphous oxide film composed essentially of an oxide containing at least one member selected from the group consisting of Zr, Ti, Hf, Sn, Ta and In and at least one member selected from the group consisting of B and Si.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.